Experimental and computational determination of dynamic characteristics of microbeam sensors

Gordon C. Brown; Ryszard J. Pryputniewicz

doi:10.1117/12.212636

23 June 1995 Experimental and computational determination of dynamic characteristics of microbeam sensors

Gordon C. Brown, Ryszard J. Pryputniewicz

Proceedings Volume 2545, Interferometry VII: Applications; (1995) https://doi.org/10.1117/12.212636
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

MicroElectromechanical Systems (MEMS) are devices fabricated with the techniques of microphotolithography to manufacture miniature actuators and sensors. Dimensions of MEMS devices are typically measured in microns. For a number of reasons, the current demand is to decrease the size of MEMS devices to submicron dimensions. However, the smaller MEMS become, the more challenging it is for engineers to measure with accuracy the static and dynamic characteristics of these devices. In this paper, electro-optic holography (EOH) and computational methods are used to study the resonant vibration behavior of submillimeter- sized cantilevered microbeam sensors. These particular sensors are probe tips made for atomic force microscopes. Important dynamic characteristics of these sensors, which must be verified experimentally, include the frequency of vibration and corresponding mode shapes, the quality factor (Q), the spring stiffness, and the vibrational amplitude. The EOH allows easy determination of these characteristics. Additionally, by performing phase measurements of an EOH image (magnified up to 100X), object displacements are determined. The finite element method (FEM) is used to model cantiliver beam dynamics in order to optimize such parameters as frequency of vibration, Q, spring sriffness, and amplitude of vibration. The FEM results are then compared to the EOH results and show acceptable correlation.

Citation Download Citation

Gordon C. Brown and Ryszard J. Pryputniewicz "Experimental and computational determination of dynamic characteristics of microbeam sensors", Proc. SPIE 2545, Interferometry VII: Applications, (23 June 1995); https://doi.org/10.1117/12.212636

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