Slit diaphragm flexures for optomechanics

Daniel Vukobratovich; Ralph M. Richard; J. P. McNiven; R. Lawrence Sinclair

doi:10.1117/12.218653

6 September 1995 Slit diaphragm flexures for optomechanics

Daniel Vukobratovich, Ralph M. Richard, J. P. McNiven, R. Lawrence Sinclair

Proceedings Volume 2542, Optomechanical and Precision Instrument Design; (1995) https://doi.org/10.1117/12.218653
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The slit diaphragm is a useful type of flexure for producing small rotations or translations. This type of flexure is easily fabricated using modern technique such as electro-discharge machining, and provides a convenient solution for certain types of precision motion problems. There are two types of slit diaphragms used in optomechanics: a two axis gimbal for rotation and a linear flexure for translation. Closed form solutions are discussed for determining rotational and radial stiffness of the two axis gimbal slit diaphragm flexure. Similar equations are given for finding the linear and radial stiffness of the linear translation slit diaphragm flexure. A design example of a focus mechanism employing a pair of linear translation slit diaphragm flexures is discussed.

Citation Download Citation

Daniel Vukobratovich, Ralph M. Richard, J. P. McNiven, and R. Lawrence Sinclair "Slit diaphragm flexures for optomechanics", Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); https://doi.org/10.1117/12.218653

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