Multiple particle technique for determination of differential scattering cross-section of very small surface bound particles

John C. Stover; Marvin L. Bernt

doi:10.1117/12.218326

1 September 1995 Multiple particle technique for determination of differential scattering cross section of very small surface bound particles

John C. Stover, Marvin L. Bernt

Author Affiliations +

Proceedings Volume 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries; (1995) https://doi.org/10.1117/12.218326
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Measurement of small particle contamination, via laser particle scanners, is an important tool for maximizing throughput in semiconductor production lines. As line widths shrink, the required minimum observable particle diameter drops in proportion. Unfortunately, the scatter signal from a small particle on a surface falls off very quickly with decreased diameter, even faster than would be predicted by a simple Rayleigh scatter model of an isolated particle. This paper reviews a technique to measure the differential scattering cross-section of very small surface bound particles. The objective is to provide a means of obtaining data for producing the next generation of particle scanners.

Citation Download Citation

John C. Stover and Marvin L. Bernt "Multiple particle technique for determination of differential scattering cross section of very small surface bound particles", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); https://doi.org/10.1117/12.218326

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