Analysis of the fundamental measuring error of aspherical surface by shearing interferometer

Qiming Xin; Yun Gao; Yuanhui Zeng

doi:10.1117/12.218417

8 September 1995 Analysis of the fundamental measuring error of aspherical surface by shearing interferometer

Qiming Xin, Yun Gao, Yuanhui Zeng

Proceedings Volume 2536, Optical Manufacturing and Testing; (1995) https://doi.org/10.1117/12.218417
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

In the methods to test an asperhical optical surface, sheering interferometer is a testing instrument by which the wavefront of the surface testing is split apart into two and then interference fringes can be formed without demanding a standard reference aspherical wavefront. However, if the sheering interferometer is applied to test an aspehrical surface, having a relatively big deviation from its best fit spherical surface, the fundamental measuring error will increase very quickly. A comprehensive analysis of this error is given and an improved method is put forward by which the testing scale of the sheering interferometer is enlarged by introducing an analogue standard wavefront produced by a computer so as to reduce error resources and to improve the testing accuracy.

Citation Download Citation

Qiming Xin, Yun Gao, and Yuanhui Zeng "Analysis of the fundamental measuring error of aspherical surface by shearing interferometer", Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); https://doi.org/10.1117/12.218417

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