Debris-free soft x-ray generation using a liquid droplet laser-plasma target

Hans M. Hertz; Lars Rymell; Magnus Berglund; Lars Malmqvist

doi:10.1117/12.221000

18 September 1995 Debris-free soft x-ray generation using a liquid droplet laser-plasma target

Hans M. Hertz, Lars Rymell, Magnus Berglund, Lars Malmqvist

Proceedings Volume 2523, Applications of Laser Plasma Radiation II; (1995) https://doi.org/10.1117/12.221000
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

We describe the use of small liquid droplets as target for laser-plasma soft x-ray and EUV generation. Using a table-top laser, this < 15 micrometers diameter plasma source typically produces line radiation with approximately 1(DOT)10¹² photons/ster-line-pulse in the water-window wavelength range. The major adcvantages of the source is that it is practically debris free. We discuss applications of the source to soft x-ray microscopy and lithography.

Citation Download Citation

Hans M. Hertz, Lars Rymell, Magnus Berglund, and Lars Malmqvist "Debris-free soft x-ray generation using a liquid droplet laser-plasma target", Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); https://doi.org/10.1117/12.221000

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