Preadjustment of small elliptical bender mirrors for an x-ray beamline

Steven C. Irick

doi:10.1117/12.212626

20 June 1995 Preadjustment of small elliptical bender mirrors for an x-ray beamline

Steven C. Irick

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212626
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The long trace profiler (LTP) has been used to assure the quality of x-ray beamline mirrors with fixed radii of curvature after they have arrived from the manufacturer and before they are permanently set in the beamline. In the case of some adjustable radius mirrors, the adjustment mechanism may require setting outside of the beamline. The bending mechanism often bends the mirror into a tangential cylinder, which is difficult to measure by interferometric methods. Measuring medium- to long-radius cylinders is a routine task for the LTP. Thus, a bendable (adjustable radius) mirror may be adjusted in the metrology laboratory before the mirror is placed in the beamline. This paper describes the method of adjustment and surface quality assessment for bendable, adjustable radius mirrors in general, and shows results for a small mirror that is bent into an elliptical cylinder.

Citation Download Citation

Steven C. Irick "Preadjustment of small elliptical bender mirrors for an x-ray beamline", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212626

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