Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films

Gerry M. Blumenstock; Ritva A. M. Keski-Kuha; Marshal L. Ginter

doi:10.1117/12.212622

20 June 1995 Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films

Gerry M. Blumenstock, Ritva A. M. Keski-Kuha, Marshal L. Ginter

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212622
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Ion-beam-deposited boron carbide thin films have been produced and evaluated as normal- incidence, reflective coatings in the extreme ultraviolet. Reflectances of over 28% were obtained for wavelengths longer than 58 nm and as high as 38.6% at 92 nm, for a freshly deposited coating. Optical constants of sputtered boron carbide were calculated from experimental observations using the reflectance-versus-angle method. X-ray photoelectron spectroscopy analysis of the deposited film was performed in order to investigate its chemical composition and effects on the long-term stability of the coating's reflectivity.

Citation Download Citation

Gerry M. Blumenstock, Ritva A. M. Keski-Kuha, and Marshal L. Ginter "Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212622

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