Comparison of rigorous methods for x-ray and XUV grating diffraction analysis

Leonid I. Goray; Boris C. Chernov

doi:10.1117/12.212594

20 June 1995 Comparison of rigorous methods for x-ray and XUV grating diffraction analysis

Leonid I. Goray, Boris C. Chernov

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212594
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A comparison of various rigorous methods of analysis for soft x ray and XUV surface-relief gratings is presented. Example results for a wide range of groove width-to-groove-spacing ratios and angles of incidence are presented for lamellar gratings. Diffraction efficiencies for gold lamellar gratings obtained from the integral and the characteristic wave methods of analysis are compared with previously published numerical results. The accuracy, the convergence, and the stability of the numerical methods are discussed.

Citation Download Citation

Leonid I. Goray and Boris C. Chernov "Comparison of rigorous methods for x-ray and XUV grating diffraction analysis", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212594

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