Production of diamond-like films by laser ablation in the presence of residual gas in a reaction chamber

Valerie A. Astapenko; Oleg E. Sidoryuk

doi:10.1117/12.203608

1 March 1995 Production of diamond-like films by laser ablation in the presence of residual gas in a reaction chamber

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203608
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

Diamond-like films were produced by laser ablation of glass-carbon target in the presence of residual gas (Ar) in a reaction chamber. It appears that the band gap value of the films deposited in this case is more than 20% greater than that of the films deposited at high vacuum. This influence of a gas on optical properties of the produced coatings was explained in the framework of a simple mechanical model.

Citation Download Citation

Valerie A. Astapenko and Oleg E. Sidoryuk "Production of diamond-like films by laser ablation in the presence of residual gas in a reaction chamber", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203608

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