Electron-bombarded back-illuminated CCD sensors for low-light-level imaging applications

George M. Williams Jr.; Alice L. Rheinheimer; Verle W. Aebi; Kenneth A. Costello

doi:10.1117/12.206518

10 April 1995 Electron-bombarded back-illuminated CCD sensors for low-light-level imaging applications

George M. Williams Jr., Alice L. Rheinheimer, Verle W. Aebi, Kenneth A. Costello

Proceedings Volume 2415, Charge-Coupled Devices and Solid State Optical Sensors V; (1995) https://doi.org/10.1117/12.206518
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1995, San Jose, CA, United States

Abstract

Low light level surveillance cameras with significantly higher performance and reduced form factor, than present state of the art are critical for many commercial and military applications. Towards this end, a new approach to low light level cameras was successfully demonstrated. In a cooperative research and development effort between Scientific Imaging Technologies, Inc. of Beaverton, Ore., and Intevac EO Sensors of Palo Alto, Calif., back-illuminated, electron-bombarded CCD (EBCCD) sensors were designed and fabricated. Experiments demonstrated the EBCCD's sensitivity and contrast resolution superior to conventional intensified CCD (ICCD) approaches. Low light level signal to noise (STN) and contrast transfer function (CTF) data are presented. A model is derived that describes the performance of the EBCCD and the back-illuminated CCD relative to conventional approaches to nighttime imaging. A design and simulated performance of a video rate 2/3 inch, back-illuminated, electron-bombarded CCD currently under development for low light imaging applications is also described.

Citation Download Citation

George M. Williams Jr., Alice L. Rheinheimer, Verle W. Aebi, and Kenneth A. Costello "Electron-bombarded back-illuminated CCD sensors for low-light-level imaging applications", Proc. SPIE 2415, Charge-Coupled Devices and Solid State Optical Sensors V, (10 April 1995); https://doi.org/10.1117/12.206518

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available