ArF and KrF excimer lasers with long lifetime: a status report

George M. Chumak

doi:10.1117/12.206952

17 April 1995 ArF and KrF excimer lasers with long lifetime: a status report

George M. Chumak

Proceedings Volume 2380, UV and Visible Lasers and Laser Crystal Growth; (1995) https://doi.org/10.1117/12.206952
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

The results of experimental investigation of factors which restrict the gas lifetime in pulsed discharge and electron beam pumped ArF and KrF for micromachining, medicine, and short-pulse excimer lasers have been presented. The correlation in between gas mixture lifetime and constant rate of fluorine concentration decrease has been observed. It has been determined that the main canal of fluorine concentration decrease is the reaction of formation of metal fluorides of electrodes. Compositions of gas phase impurities of laser mixture which are formed during the laser operating and their influence on the characteristics of laser emission have been ascertained. An absence of appreciable influence of absorption and scattering of laser emission by impurities has been revealed. The mechanism of influence of solid-state impurities on lasing energy has been suggested.

Citation Download Citation

George M. Chumak "ArF and KrF excimer lasers with long lifetime: a status report", Proc. SPIE 2380, UV and Visible Lasers and Laser Crystal Growth, (17 April 1995); https://doi.org/10.1117/12.206952

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