Method of measuring small periodical movements involving laser interferometry

Tatiana Lukianowicz; Czeslaw Lukianowicz

doi:10.1117/12.195941

12 December 1994 Method of measuring small periodical movements involving laser interferometry

Tatiana Lukianowicz, Czeslaw Lukianowicz

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195941
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

In the paper, a description of a method of measuring little periodical movements involving laser interferometer is presented. The principle of this method is to use vibration table during contact verification instruments. The table is activated by periodical signal. All the movements of the table are measured by laser interferometer. Measurements of table movements are obtained thanks to interferogram which shows particular states of the table. Theoretical basis and measurement errors analysis of this method are presented in the paper. The measuring system, which has been worked out, consisting of vibration table, laser interferometer and measuring signal transforming unit is also described. During the studies its field of application has been defined. Comparative studies and practical tests have proved the effectiveness of the system. The research stand makes it possible to measure displacements of the mobile element of a vibration table, which can perform oscillations from 0.1 Hz to 500 Hz frequencies. Harmonic vibrations amplitude range is from 0.15 micrometers to 7.5 micrometers for vibration frequencies lower than 50 Hz. For vibrations of frequencies higher than 50 Hz, the lower limit of measuring amplitudes range is 0.15 micrometers and the upper limit of this range decreases with vibration frequencies increase. Displacements measuring error in harmonic movements depends mainly on laser light wavelength reproducing error and on interference signal measuring errors. While using the worked out method one more error appears. It arises from not performing Abbe's postulate. Value of displacement measuring relative error in this method does not exceed 3% and it decreases with vibration amplitude increase. Value of this error can be decreased by appropriate vibration table amplitude setting.

Citation Download Citation

Tatiana Lukianowicz and Czeslaw Lukianowicz "Method of measuring small periodical movements involving laser interferometry", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195941

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