Distortion testing of interferometer for flatness standard measurement

Leszek A. Salbut; Romulad Jozwicki

doi:10.1117/12.195926

12 December 1994 Distortion testing of interferometer for flatness standard measurement

Leszek A. Salbut, Romulad Jozwicki

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195926
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

The method for interferometer quality testing and calibration is described. The theoretical analysis and measurement results of the Fizeau interferometer errors are presented and discussed.

Citation Download Citation

Leszek A. Salbut and Romulad Jozwicki "Distortion testing of interferometer for flatness standard measurement", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195926

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