Fabrication and optical properties of multilayer epitaxial ferroelectric n X (SrTiO3/PbTiO3) thin films by the sol-gel technique

Yudan Lou; Yuhuan Xu; John D. Mackenzie

doi:10.1117/12.188940

13 October 1994 Fabrication and optical properties of multilayer epitaxial ferroelectric nX(SrTiO₃/PbTiO₃) thin films by the sol-gel technique

Yudan Lou, Yuhuan Xu, John D. Mackenzie

Author Affiliations +

Proceedings Volume 2288, Sol-Gel Optics III; (1994) https://doi.org/10.1117/12.188940
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The sol-gel process was used to form ferroelectric epitaxial PbTiO₃ and SrTiO₃ thin films on single crystal SrTiO₃ substrates. In this study, optically transparent multilayer n$CHI[SrTiO₃/PbTiO₃] thin films were grown successfully along the (001) direction on single crystal SrTiO₃ substrates. Lead titanium double alkoxide and strontium titanium double alkoxide were used as precursors. The layers of transparent PbTiO₃ films were obtained by heat treatment at 700 degree(s)C in PbO atmosphere, while the layers of SrTiO₃ were obtained at 800 degree(s)C in air. The average thickness of each PbTiO₃ or SrTiO₃ layer was measured by SEM analysis. The change of optical transmittance with wavelength for a sample with 12 (6$CHI[SrTiO₃/PbTiO₃]) layers film was measured. The refractive index of PbTiO₃ and SrTiO₃ films grown on Si substrates was measured with respect to film thickness. The epitaxial growth of the PbTiO₃ thin films and SrTiO₃ thin films was investigated using XRD, HRTEM, and SEM analysis. The structure, growth parameters, and optical properties of the films are discussed.

Citation Download Citation

Yudan Lou, Yuhuan Xu, and John D. Mackenzie "Fabrication and optical properties of multilayer epitaxial ferroelectric nX(SrTiO₃/PbTiO₃) thin films by the sol-gel technique", Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); https://doi.org/10.1117/12.188940

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