Design of an EUV spectrometer with stigmatic image focusing using spherical varied line-space gratings

Tatsuo Harada; Hideo Sakuma; Toshiaki Kita; Masato Nakamura

doi:10.1117/12.193186

7 November 1994 Design of an EUV spectrometer with stigmatic image focusing using spherical varied line-space gratings

Tatsuo Harada, Hideo Sakuma, Toshiaki Kita, Masato Nakamura

Proceedings Volume 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry; (1994) https://doi.org/10.1117/12.193186
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

A method of designing spectrometers having stigmatic image focusing properties by using spherical varied line-space (SVLS) grating is developed and is compared with toroidal uniform line-space (TULS) grating design. Helium emission sensors using concave grating spectrometers are designed to detect 30.4 nm and 58.4 nm EUV emissions. The SVLS design is found to be superior to the TULS design not only theoretically in stigmatic image focusing properties, but also practically in the ease of fabrication.

Citation Download Citation

Tatsuo Harada, Hideo Sakuma, Toshiaki Kita, and Masato Nakamura "Design of an EUV spectrometer with stigmatic image focusing using spherical varied line-space gratings", Proc. SPIE 2283, X-Ray and Ultraviolet Spectroscopy and Polarimetry, (7 November 1994); https://doi.org/10.1117/12.193186

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