Real-time measurement of nonvolatile residue contamination in cleanroom environments

Paul A. Mogan

doi:10.1117/12.188824

4 October 1994 Real-time measurement of nonvolatile residue contamination in cleanroom environments

Paul A. Mogan

Proceedings Volume 2270, NASA/SPIE Conference on Spin-Off Technologies from NASA for Commercial Sensors and Scientific Applications; (1994) https://doi.org/10.1117/12.188824
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

A Real-Time Instrument for the detection of non-volatile residues (NVR) was developed under an SBIR Phase I contract for the NASA Contamination Monitoring Laboratory at Kennedy Space Center (KSC) in Florida. A prototype device was fabricated and field tested in the Operations and Checkout Building and at the Orbiter Processing Facility at KSC. During the field testing, the data from the instrument was compared to standard KSC non-volatile residue measurements which are based on ASTM 1234/1235. Time fluctuations, unique to the real time measurement process, were also correlated to activity logs for the facility. The prototype instrument has already been applied commercially in the semiconductor industry to study NVR contamination in the plastic boats that wafers are stored and transported in during processing. This technology is being evaluated for use in the Hubble Space Telescope refurbishment mission to monitor NVR deposition during integration and processing prior to launch. This paper will discuss the temperature controlled SAW NVR instrument development program as well as the field testing done at KSC. Application to measurements of non-volatile residue in operational environments and comparisons with KSC NVR measurements will be made.

Citation Download Citation

Paul A. Mogan "Real-time measurement of nonvolatile residue contamination in cleanroom environments", Proc. SPIE 2270, NASA/SPIE Conference on Spin-Off Technologies from NASA for Commercial Sensors and Scientific Applications, (4 October 1994); https://doi.org/10.1117/12.188824

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