Vibration control: the rigid equipment support platform

William Reid

doi:10.1117/12.188864

4 October 1994 Vibration control: the rigid equipment support platform

William Reid

Proceedings Volume 2264, Vibration Monitoring and Control; (1994) https://doi.org/10.1117/12.188864
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

TMC has developed a practical method of rigidly supporting vibration-sensitive and heavy equipment in raised-grid cleanroom floors. The direction application has been in semiconductor fabrication and testing areas. The primary interest is to provide stable support for such equipment where elastomeric, or `spring', suspension systems are not required for actual attenuation of vibration. A system of modular support stands and rigid platform tops is described. Accelerometers and a spectrum analyzer are used to make adjustments to the stands so as to optimize uniformity of support. Dynamic analysis is therefore an intrinsic part of the `system', and allows immediate evaluation of the overall vibration condition.

Citation Download Citation

William Reid "Vibration control: the rigid equipment support platform", Proc. SPIE 2264, Vibration Monitoring and Control, (4 October 1994); https://doi.org/10.1117/12.188864

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