Paper
4 November 1994 Fabrication of laser mirrors using ion beam sputter deposition
John Allen, Peter G. Girow, D. M. Yates, N. Anscomb
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192157
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
The problems of laser damage in thin film laser mirrors is widely reported and techniques to increase laser induced damage threshold are continually being sought. This paper describes the design and manufacture of laser mirrors for high power lasers using ion beam sputter deposition techniques in a production sized box coater. Substrate preparation is described, the use of evaluation techniques to assess quality are discussed and the problems to be solved with ion beam processes are highlighted. Laser mirrors with extremely low losses (a few parts per million) have been fabricated and the laser induced damage threshold measured using high power ruby and YAG lasers. This is compared with similarly designed laser mirrors fabricated by conventional electron beam evaporation and ion assisted deposition, and the results are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Allen, Peter G. Girow, D. M. Yates, and N. Anscomb "Fabrication of laser mirrors using ion beam sputter deposition", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192157
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KEYWORDS
Mirrors

Ions

Ion beams

Laser damage threshold

Laser induced damage

Thin films

Coating

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