Energetic particles for vacuum deposition

Hermann R. Dobler

doi:10.1117/12.192108

4 November 1994 Energetic particles for vacuum deposition

Hermann R. Dobler

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192108
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Conventional vacuum deposition had gradually been improved by a lot of special processes. We summarize the most important ones and give an evaluation of a few process parameters. The discussion is limited to optical coating on glass.

Citation Download Citation

Hermann R. Dobler "Energetic particles for vacuum deposition", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192108

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