Fully automated angle resolved scatterometer

Jakob Neubert; Thomas Seifert; Norbert Czarnetzki; Thomas Weigel

doi:10.1117/12.188112

30 September 1994 Fully automated angle resolved scatterometer

Jakob Neubert, Thomas Seifert, Norbert Czarnetzki, Thomas Weigel

Proceedings Volume 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics; (1994) https://doi.org/10.1117/12.188112
Event: Space Optics '94, 1994, Garmisch, Germany

Abstract

The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 10⁵ to 10^-6 sr^-1) in BRDF. These measurements can be carried out for surfaces made of any dielectric, metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics. The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows. It is shown, that the scatterometer is sensitive to a rms-roughness better than 1 nm.

Citation Download Citation

Jakob Neubert, Thomas Seifert, Norbert Czarnetzki, and Thomas Weigel "Fully automated angle resolved scatterometer", Proc. SPIE 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics, (30 September 1994); https://doi.org/10.1117/12.188112

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