Paper
16 August 1994 NovaTubeTM: a breakthrough toward sealed-off excimer lasers
Bernard K. Nikolaus, Ulrich Rebhan, Rainer Paetzel, Frank Voss, Dirk Basting
Author Affiliations +
Proceedings Volume 2206, High-Power Gas and Solid State Lasers; (1994) https://doi.org/10.1117/12.184633
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria
Abstract
NovaTubeTM is the result of many years of extensive material research at Lambda Physik to develop a laser cavity of quasi sealed-off laser performance. As test data demonstrate the operating costs can be cut 10 times using the new tube. Test runs in the laboratory have culminated in 109 shots operation on a single gas fill achieved with a 50 W KrF laser.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernard K. Nikolaus, Ulrich Rebhan, Rainer Paetzel, Frank Voss, and Dirk Basting "NovaTubeTM: a breakthrough toward sealed-off excimer lasers", Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); https://doi.org/10.1117/12.184633
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KEYWORDS
Excimer lasers

Pulsed laser operation

Cryogenics

Gas lasers

Electrodes

Laser development

Halogens

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