Improving CCD quantum efficiency

Michael P. Lesser

doi:10.1117/12.176777

1 June 1994 Improving CCD quantum efficiency

Michael P. Lesser

Proceedings Volume 2198, Instrumentation in Astronomy VIII; (1994) https://doi.org/10.1117/12.176777
Event: 1994 Symposium on Astronomical Telescopes and Instrumentation for the 21st Century, 1994, Kailua, Kona, HI, United States

Abstract

The enhancement of the quantum efficiency of charge-coupled devices (CCDs) can be accomplished by several methods. The most dramatic increase comes from thinning the CCD for use in the back illuminated mode. Techniques to improve the QE of back illuminated CCDs include the deposition of backside thin film coatings to reduce reflection losses, surface charging to eliminate the backside potential well, and several aspects of device packaging. We have developed processes in these areas which have led to the post-manufacture optimization of devices for astronomical observations. WE describe our backside oxidation results and the interaction of the oxide with backside charging, the effect of ion absorption on backside charging, the development of one and two-layer antireflection coatings, and a new packaging method to improve near-infrared quantum efficiency.

Citation Download Citation

Michael P. Lesser "Improving CCD quantum efficiency", Proc. SPIE 2198, Instrumentation in Astronomy VIII, (1 June 1994); https://doi.org/10.1117/12.176777

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