Analysis of microlithography in an open-architecture TCAD system

Valery Axelrad; Victor V. Boksha; Yuri Granik; Ognjen Milic; Juan C. Rey; D. Ward; Eduard I. Tochitsky

doi:10.1117/12.175459

17 May 1994 Analysis of microlithography in an open-architecture TCAD system

Valery Axelrad, Victor V. Boksha, Yuri Granik, Ognjen Milic, Juan C. Rey, D. Ward, Eduard I. Tochitsky

Proceedings Volume 2197, Optical/Laser Microlithography VII; (1994) https://doi.org/10.1117/12.175459
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

The paper offers the results of investigations of forming the submicron topological structures of the `contact window'-type by using only all-dry vacuum and plasmas technologies. Analysis is made of the relationship between lithographic and electric parameters of contact systems with micron-size features. A technological process of manufacturing a three-layer structure `metal-dielectric-metal' by using the LVPL is developed to study electric characteristic of systems with micron and submicron contact windows. Analysis is made of the 0.5 - 1.0 micrometers to 0.5 - 0.3 micrometers . To form masks, use was made of vacuum resist 0.4 to 0.7 micrometers films deposited onto 0.29 micrometers thick silicon oxide layers on a silicon substrate. The resist was subjected to exposure with simultaneous development on a LVPL apparatus. An average of laser radiation power, a pulse repetition rate, a degree of vacuum were maintained constant, while a dose was varied by changing the exposure at E equals 1 J/cm². Next plasmochemical etching of Al or silicon oxide was performed through a vacuum resist-mask.

Citation Download Citation

Valery Axelrad, Victor V. Boksha, Yuri Granik, Ognjen Milic, Juan C. Rey, D. Ward, and Eduard I. Tochitsky "Analysis of microlithography in an open-architecture TCAD system", Proc. SPIE 2197, Optical/Laser Microlithography VII, (17 May 1994); https://doi.org/10.1117/12.175459

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available