Design of an inchworm-type linear piezomotor

Bi Zhang; Zhenqi Zhu

doi:10.1117/12.175214

6 May 1994 Design of an inchworm-type linear piezomotor

Bi Zhang, Zhenqi Zhu

Proceedings Volume 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems; (1994) https://doi.org/10.1117/12.175214
Event: 1994 North American Conference on Smart Structures and Materials, 1994, Orlando, FL, United States

Abstract

This paper details the design and development of an inchworm-type linear piezomotor that consists of three piezoelectric actuators, a monolithic flexure frame, and a guideway. The design is accomplished using the finite element methods to optimize the stiffness of elastic hinges and to calculate the stress-strain field of the flexure frame. The buckling of the bolted joints and interface stiffness of the quideway, and jerking of the linear piezomotor motion, are discussed. The linear piezomotor is capable of traveling speed of 1.6 mm/s over a travel range of 300 mm with a positioning resolution of 5 nm. It also provides a stiffness of 90 N/micrometers and an output force of 200 N.

Citation Download Citation

Bi Zhang and Zhenqi Zhu "Design of an inchworm-type linear piezomotor", Proc. SPIE 2190, Smart Structures and Materials 1994: Smart Structures and Intelligent Systems, (6 May 1994); https://doi.org/10.1117/12.175214

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available