Thin film multilayers of TiNi/TiO2/PZT: mechanical and ferroelectrical characterization

A. Peter Jardine; Peter G. Mercado

doi:10.1117/12.174075

1 May 1994 Thin film multilayers of TiNi/TiO₂/PZT: mechanical and ferroelectrical characterization

A. Peter Jardine, Peter G. Mercado

Proceedings Volume 2189, Smart Structures and Materials 1994: Smart Materials; (1994) https://doi.org/10.1117/12.174075
Event: 1994 North American Conference on Smart Structures and Materials, 1994, Orlando, FL, United States

Abstract

This paper concerns the mechanical and ferroelectrical properties of TiNi/TiO₂/PZT multilayers. As prototypes for `smart' materials, the TiNi and oxide ceramics must be capable of both sensing and actuation functions. For testing of the properties of these meso-scale structures to occur, the mechanical and electrical properties of the individual components need to be characterized. The mechanical properties of the PZT thin film were characterized by Scanning Electron Microscopy and optical microscopy. Cracking and defects in the PZT were observed for thick films, however thin PZT films of 1 micron or less showed better mechanical integrity. The ferroelectric properties of the PZT thin films were smaller than for bulk PZT; this was likely associated with leakage currents caused by the mechanical imperfections of the films.

Citation Download Citation

A. Peter Jardine and Peter G. Mercado "Thin film multilayers of TiNi/TiO₂/PZT: mechanical and ferroelectrical characterization", Proc. SPIE 2189, Smart Structures and Materials 1994: Smart Materials, (1 May 1994); https://doi.org/10.1117/12.174075

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