Diffraction method for testing a periodic microstructure

Voldemar Petrovich Koronkevich; Galina A. Lenkova

doi:10.1117/12.190212

12 October 1994 Diffraction method for testing a periodic microstructure

Voldemar Petrovich Koronkevich, Galina A. Lenkova

Proceedings Volume 2169, Nonconventional Optical Imaging Elements; (1994) https://doi.org/10.1117/12.190212
Event: International Colloquium on Nonconventional Optical Imaging Elements, 1993, Rydzyna-Rokosowo, Poland

Abstract

A method and experimental setup have been developed for testing the parameters (a pitch, pitch regularity, a gap- to-pitch, amplitude transmission and phase delay) of a periodic microstructure at different stages of fabrication. The method is based on measuring the distribution of light intensity in the diffraction spectrum of a grating. Experimental results on the quality of tracks of a photomask and master grating are presented.

Citation Download Citation

Voldemar Petrovich Koronkevich and Galina A. Lenkova "Diffraction method for testing a periodic microstructure", Proc. SPIE 2169, Nonconventional Optical Imaging Elements, (12 October 1994); https://doi.org/10.1117/12.190212

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