Integrated TCAD for OEIC applications

Robert W. Dutton; Francis M. Rotella; Zak Sahul; L. So; Zhiping Yu

doi:10.1117/12.178499

30 June 1994 Integrated TCAD for OEIC applications

Robert W. Dutton, Francis M. Rotella, Zak Sahul, L. So, Zhiping Yu

Proceedings Volume 2146, Physics and Simulation of Optoelectronic Devices II; (1994) https://doi.org/10.1117/12.178499
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Progress in technology CAD (TCAD) tools that span the range of IC circuit design, semiconductor device modeling, and material processing simulation is discussed. Special emphasis is given to the application in the optoelectronic devices and systems. Promising techniques for the mixed device/circuit simulation are presented, using UC Berkeley's SPICE and Stanford's PISCES programs. Results show the capability to optimize the circuit timing and impedances to match the internal physical effects and the resulting optical properties in AlGaAs based LEDs. 3D solid modeling, a new approach for interactive device design based on the mask layout information, is discussed. Automatic gridding to support a unified process/device modeling capability for GaAs structures using SUPREM-IV.GS is also introduced. Taken as a whole, the unification of these TCAD tools provides a powerful design approach for the world of the optoelectronic ICs (OEIC).

Citation Download Citation

Robert W. Dutton, Francis M. Rotella, Zak Sahul, L. So, and Zhiping Yu "Integrated TCAD for OEIC applications", Proc. SPIE 2146, Physics and Simulation of Optoelectronic Devices II, (30 June 1994); https://doi.org/10.1117/12.178499

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