Self-calibrated capacitive instrument for measuring the thickness of coating on metal

Ping-An Mu; R.J. Zhang; Chan-Yao Chen

doi:10.1117/12.156381

22 September 1993 Self-calibrated capacitive instrument for measuring the thickness of coating on metal

Ping-An Mu, R.J. Zhang, Chan-Yao Chen

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156381
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper gives an outline of the self-calibrated capacitive instrument for measuring the thickness of coating on metal. Based on the improved method about reducing the influence of fringing effect, stray capacity etc., a 3-parameters model is proposed, by which the nonlinear calibration is very convenient in measuring different materials,

Citation Download Citation

Ping-An Mu, R.J. Zhang, and Chan-Yao Chen "Self-calibrated capacitive instrument for measuring the thickness of coating on metal", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156381

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