Waveguide excimer laser fabrication of 3D microstructures

C. Paul Christensen Jr.

doi:10.1117/12.167552

1 February 1994 Waveguide excimer laser fabrication of 3D microstructures

C. Paul Christensen Jr.

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167552
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Waveguide excimer lasers in combination with high-resolution imaging and precision motion control systems are capable of direct-write shaping of many polymers, ceramics, glasses, and metal films. Three-dimensional structures can be produced by scanning the worksurface under the focused beam and varying the energy delivered to the worksurface through use of various exposure algorithms. Using this technique, we have produced 3-D structures in polyimide and diamond that demonstrate high spatial resolution and good surface finish.

Citation Download Citation

C. Paul Christensen Jr. "Waveguide excimer laser fabrication of 3D microstructures", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167552

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