Laser beam direct writing of fine lines of alpha-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process

Songsheng Xue; Wahib Ousi-Benomar; Roger A. Lessard

doi:10.1117/12.167562

1 February 1994 Laser-beam direct writing of fine lines of alpha-Fe₂O₃ from metalorganic spin-coated films and transient behavior study of laser decomposition process

Songsheng Xue, Wahib Ousi-Benomar, Roger A. Lessard

Author Affiliations +

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167562
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Fine lines of (alpha) -Fe₂O₃ have been formed on quartz substrates by laser beam direct writing on metalorganic (MO) spin-coated films. A modulated krypton ion writing laser beam and a He-Ne probing laser beam were colinearly focused onto the films with a spot size about 10 - 50 micrometers . A series of characterizations were conducted on the written lines by employing characterization techniques ranging from TGA, FTIR, SEM, XRD, to TEM. In this way a better understanding has been achieved regarding the metalorganic decomposition mechanism, structure and morphology of the laser written lines. From the time-resolved transmittance change induced by the krypton ion laser pulse irradiation, transient behavior of laser decomposition process of metalorganic materials has been studied.

Citation Download Citation

Songsheng Xue, Wahib Ousi-Benomar, and Roger A. Lessard "Laser-beam direct writing of fine lines of alpha-Fe₂O₃ from metalorganic spin-coated films and transient behavior study of laser decomposition process", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167562

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KEYWORDS

Laser processing

Crystals

Quartz

Transmission electron microscopy

FT-IR spectroscopy

Optical lithography

Thin films

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