Profilometry by white light autocorrelation function sampling

Patrick Sandoz

doi:10.1117/12.172610

1 March 1994 Profilometry by white light autocorrelation function sampling

Patrick Sandoz

Proceedings Volume 2004, Interferometry VI: Applications; (1994) https://doi.org/10.1117/12.172610
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

With a wide spectrum light source, the auto-correlation function of the emitted beam is nil except for very short values of the optical time delay. This property is used in an interferometric set-up to identify the zero optical path difference between the two interfering arms and to analyze surface profile. The proposed technique is based on a simple intensity detection and does not compute any phase calculation. Therefore, we are not concerned with the phase ambiguity problem associated to classical phase shifting interferometers. We first present the acquisition principle and discuss the operating conditions which guarantee a correct detection. Secondly, the experimental results show the nanometric resolution of the proposed technique. We finally explain the interest in combining this method with actual confocal or phase shifting profilometers.

Citation Download Citation

Patrick Sandoz "Profilometry by white light autocorrelation function sampling", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); https://doi.org/10.1117/12.172610

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