Optical metrology used to sense and control a segmented optical system

Michael J. Fehniger

doi:10.1117/12.165489

10 December 1993 Optical metrology used to sense and control a segmented optical system

Michael J. Fehniger

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165489
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Optical metrology was developed to sense the wavefront of a mosaic optical system to correctly position and bend an active optical element. The optical system being examined is a telescope, with a segmented primary mirror, tested in auto-collimation. Located in the focal plane are two interferometers, a simultaneous phase shifting interferometer which measures the system wavefront and a lateral shearing interferometer which measures piston. The resultant wavefront and piston data are passed to a master computer which computes the forces and vectors necessary to position and bend the active element. This paper describes these interferometers, their evolution, requirements, calibration, and data evaluation techniques employed. Results from actual system testing are presented.

Citation Download Citation

Michael J. Fehniger "Optical metrology used to sense and control a segmented optical system", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165489

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