New measurement of metal surface roughness rq and sm by using dynamical speckle

Ying-Dong Liu; Yawei Wang

doi:10.1117/12.165480

10 December 1993 New measurement of metal surface roughness r_q and s_m by using dynamical speckle

Ying-Dong Liu, Yawei Wang

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165480
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This essay deals with the characteristics of scattered light on metal surface under the irradiation of dynamic speckles in theory. According to the relationship between the second order moment of the integrate intensity of scattered light in far field and the parameters of surface roughness R_q and S_m, a split system capable of generating dynamic speckles is presented which is made up of ground-glass and a BS mirror. This system causes the coherent plane wave coming from a He-Ne Laser to produce dynamic speckles and then irradiate the metal surface through which the scattered optical field was received by 1-D-CCD which is divided into two signal areas and then form two experiment conditions. Finally, based on the two received contrasting signals, the value of R_q and S_m is determined both individually and at the same time.

Citation Download Citation

Ying-Dong Liu and Yawei Wang "New measurement of metal surface roughness r_q and s_m by using dynamical speckle", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165480

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