Paper
10 December 1993 Holographic fringe interpretation by FFT and carrier-fringe method
Yeong-Uk Ko, Chu-Shik Kang, Myung-Sai Chung, Young Ha Kwon
Author Affiliations +
Abstract
We describe a holographic deformation measurement system which uses FFT and carrier fringe method. Since all processes are fully automatic and we use a real time holographic interferometer, continuous deformation could be measured in real time.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yeong-Uk Ko, Chu-Shik Kang, Myung-Sai Chung, and Young Ha Kwon "Holographic fringe interpretation by FFT and carrier-fringe method", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165457
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KEYWORDS
Fringe analysis

Holography

Modulation

Time metrology

Interferometry

Semiconducting wafers

Silicon

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