Production and control of refractive and diffractive microlenses

Johannes Schwider; Stefan Haselbeck; Horst Schreiber; Horst Sickinger; Oliver R. Falkenstoerfer; Norbert Lindlein; Andreas Zoeller; Helmut Haidner; Peter Kipfer; M. Heissmeier; Tuula Keinonen; John T. Sheridan; Sven Brinkmann; Norbert Streibl

doi:10.1117/12.165679

15 December 1993 Production and control of refractive and diffractive microlenses

Johannes Schwider, Stefan Haselbeck, Horst Schreiber, Horst Sickinger, Oliver R. Falkenstoerfer, Norbert Lindlein, Andreas Zoeller, Helmut Haidner, Peter Kipfer, M. Heissmeier, Tuula Keinonen, John T. Sheridan, Sven Brinkmann, Norbert Streibl

Author Affiliations +

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165679
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Refractive or diffractive microlenses have already been reported. Here we discuss two examples of microlenses where the generation process and the interferometric control are strongly interwoven. For refractive lenses we use lenses melted in photoresist and also reactive ion etched samples. The control is done with the help of a phase shifting interference microscope of the Mach-Zehnder type. We developed an evaluation software under Windows. The software allows for the evaluation of the wave aberrations and related functions as are psf and otf.

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Johannes Schwider, Stefan Haselbeck, Horst Schreiber, Horst Sickinger, Oliver R. Falkenstoerfer, Norbert Lindlein, Andreas Zoeller, Helmut Haidner, Peter Kipfer, M. Heissmeier, Tuula Keinonen, John T. Sheridan, Sven Brinkmann, and Norbert Streibl "Production and control of refractive and diffractive microlenses", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165679

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