Paper
15 December 1993 New fields for integrated optics on silicon
Patrick Louis Mottier, Serge Valette
Author Affiliations +
Abstract
Integrated Optics on Silicon substrate (IOS) has appeared very early. This original work was concerned with monolithic integration of waveguides and photodiodes which seemed then to be THE major advantage of silicon. Since these pioneer times, a lot of work has been done and new reasons for the world-wide success of silicon have emerged. We try in the following paper to make a short overview of the possibilities offered by silicon, along with new trends appearing on IOS, each of them trying to overcome the limitation of IOS to passive devices.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrick Louis Mottier and Serge Valette "New fields for integrated optics on silicon", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165702
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KEYWORDS
Silicon

Integrated optics

Sensors

Channel waveguides

Optical fibers

Waveguides

Chemical vapor deposition

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