Miniaturized optical systems for beam deflection and modulation

Rolf Goering; Wolfgang Berner; Ernst-Bernhard Kley

doi:10.1117/12.165707

15 December 1993 Miniaturized optical systems for beam deflection and modulation

Rolf Goering, Wolfgang Berner, Ernst-Bernhard Kley

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165707
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A new configuration of three micro-optical elements has been proposed for the realization of miniaturized optical beam deflection and modulation modules: One element with a special surface corrugation profile is placed in the focal plane of two microlenses or microlens arrays, one for focussing the incoming beam(s) and the second for output beam collimation. When the middle element is moved in lateral direction with respect to the optical axis, the parameters of the optical beam(s) is/are influenced depending on the real micro-optic structure. The results of first experiments on optical beam deflection and phase modulation are demonstrated.

Citation Download Citation

Rolf Goering, Wolfgang Berner, and Ernst-Bernhard Kley "Miniaturized optical systems for beam deflection and modulation", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165707

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