Grating parameter estimation using scatterometry

S. Sohail H. Naqvi; John Robert McNeil; Richard H. Krukar; Ziad R. Hatab

doi:10.1117/12.165685

15 December 1993 Grating parameter estimation using scatterometry

S. Sohail H. Naqvi, John Robert McNeil, Richard H. Krukar, Ziad R. Hatab

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165685
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The trend towards smaller design geometries for microelectronics devices places unprecedented demands on the measurement of these small structures. Two sample problems are considered. In the first case we predict the shape of developed photoresist gratings from diffraction data obtained from an angle scanning scatterometer in which a detector tracks a particular diffraction order as the angle of incidence is varied. The second problem we consider is the prediction of depths of cylindrical cells etched into Silicon. A dome scatterometer is used to collect the 2-D diffraction signal and in this case the experimental data is used to construct a data base of scatter signals.

Citation Download Citation

S. Sohail H. Naqvi, John Robert McNeil, Richard H. Krukar, and Ziad R. Hatab "Grating parameter estimation using scatterometry", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165685

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