Reducing the surface scattering of diamond optical thin films

Yuanhua Shen; Xuantong Ying; Hang Xue; Zhongjing Xing; G. Q. Ke; K. T. Chen; Fengshan Zhang; Jianzhong Xu; ShiDe Ling; Xiuzhen Liang

doi:10.1117/12.144125

11 May 1993 Reducing the surface scattering of diamond optical thin films

Yuanhua Shen, Xuantong Ying, Hang Xue, Zhongjing Xing, G. Q. Ke, K. T. Chen, Fengshan Zhang, Jianzhong Xu, ShiDe Ling, Xiuzhen Liang

Author Affiliations +

Proceedings Volume 1979, 1992 International Conference on Lasers and Optoelectronics; (1993) https://doi.org/10.1117/12.144125
Event: 1992 International Conference on Lasers and Optoelectronics, 1992, Bejing, China

Abstract

Since it has many outstanding properties, chemical vapor deposition (CVD) diamond thin film should be an excellent optical coating, but it has not been widely used because its surface is too rough. For reducing the surface roughness we tried different ways to process the substrates, choose optimum film growing conditions, polish the surface by ion beam and cover it with diamond-like-carbon (DLC) films. It has been shown that with the appropriate process, we can reproducibly get pretty smooth surface with roughness less than 250 angstroms and the transmittance of a silicon substrate, single side coated with diamond film, approaches 66% at wavelengths around 6 micrometers , which means the light scattering of the sample has been reduced to less than 1%.

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Yuanhua Shen, Xuantong Ying, Hang Xue, Zhongjing Xing, G. Q. Ke, K. T. Chen, Fengshan Zhang, Jianzhong Xu, ShiDe Ling, and Xiuzhen Liang "Reducing the surface scattering of diamond optical thin films", Proc. SPIE 1979, 1992 International Conference on Lasers and Optoelectronics, (11 May 1993); https://doi.org/10.1117/12.144125

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