Positive-tone dry-develop resist based on crosslinking a phenolic resin

Scott A. MacDonald; Carl E. Larson; Hubert Schlosser; Phillip J. Brock; Nicholas J. Clecak; Jean M. J. Frechet

doi:10.1117/12.154762

15 September 1993 Positive-tone dry-develop resist based on crosslinking a phenolic resin

Scott A. MacDonald, Carl E. Larson, Hubert Schlosser, Phillip J. Brock, Nicholas J. Clecak, Jean M. J. Frechet

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154762
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

We have previously shown that a copolymer of p-hydroxstyrene and p-acetoxymethylstyrene can be used as a sensitive deep UV resist. In that study we demonstrated that a formulation of this copolymer and an onium salt could be exposed, baked and developed in aqueous base to yield a high resolution negative tone relief image. In this paper we discuss a gas phase silylation process that converts this negative tone solvent-developable resist system into a positive tone dry-developable resist system. We have used an FT-IR microscope, coupled to a motorized X-Y stage, to study the silylation process as a function of UV exposure dose and silylation processing parameters. By altering the copolymer ratio, we found that resist contrast increased when the amount of acetoxymethylstyrene increased. This resist system and dry develop process were used to print 0.35 micrometers images at a DUV dose of approximately 25 mJ/cm².

Citation Download Citation

Scott A. MacDonald, Carl E. Larson, Hubert Schlosser, Phillip J. Brock, Nicholas J. Clecak, and Jean M. J. Frechet "Positive-tone dry-develop resist based on crosslinking a phenolic resin", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154762

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