Novel novolac resins produced from 2,6-bishydroxymethyl-p-cresol, p-cresol, and m-cresol: a method to more evenly distribute p-cresol units throughout a novolac resin

Alfred T. Jeffries III; David J. Brzozowy; Nancy N. Greene; Tadayoshi Kokubo; Shiro Tan

doi:10.1117/12.154757

15 September 1993 Novel novolac resins produced from 2,6-bishydroxymethyl-p-cresol, p-cresol, and m-cresol: a method to more evenly distribute p-cresol units throughout a novolac resin

Alfred T. Jeffries III, David J. Brzozowy, Nancy N. Greene, Tadayoshi Kokubo, Shiro Tan

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Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154757
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

In an effort to improve the performance of positive resists by increasing the amounts of o,o- bonding, some m-/p-cresol novolacs were prepared in which a portion of the p-cresol was replaced by 2,6-bishydroxymethyl-p-cresol (BHMPC). This work distinguishes itself from earlier work in which BHMPC was the sole source of p-cresol. Fractionated BHMPC polymers were shown to incorporate more p-cresol into their higher molecular weight portions of the molecules. The parent novolacs possessed lower molecular weights and polydispersivities than conventional m-/p-cresol novolacs of the same composition. The lithographically acceptable polymers were evaluated on an 0.52 NA i-line stepper. The resists made from the fractionated BHMPC polymers exhibited a direct relationship between the amount of p-cresol in the higher molecular weight fractions and resolution. The reasons for the difference in performance are discussed in terms of the m-/p-cresol contents of the fractionated and unfractionated polymers as determined by carbon-13 nmr.

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Alfred T. Jeffries III, David J. Brzozowy, Nancy N. Greene, Tadayoshi Kokubo, and Shiro Tan "Novel novolac resins produced from 2,6-bishydroxymethyl-p-cresol, p-cresol, and m-cresol: a method to more evenly distribute p-cresol units throughout a novolac resin", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154757

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