Acid-catalyzed single-layer resists for ArF lithography

Roderick R. Kunz; Robert D. Allen; William D. Hinsberg; Gregory M. Wallraff

doi:10.1117/12.154749

15 September 1993 Acid-catalyzed single-layer resists for ArF lithography

Roderick R. Kunz, Robert D. Allen, William D. Hinsberg, Gregory M. Wallraff

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154749
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

A positive-tone single-layer resist for use with 193 nm radiation has been developed. The system contains a terpolymer of methyl methacrylate, methacrylic acid, and (tau) -butyl methacrylate, along with a photoacid generator. The chemically amplified deprotection of the (tau) -butyl methacrylate into methacrylic acid increases the polarity of the resist and allows selective dissolution in metal-ion-free aqueous base solutions. The resist sensitivity is less than 10 mJ/cm², and its inherent resolution is better than 0.1 micrometers . These acrylate-based systems have potential for both lower cost and better environmental stability compared with the deep ultraviolet chemically amplified resists which use phenolic resins.

Citation Download Citation

Roderick R. Kunz, Robert D. Allen, William D. Hinsberg, and Gregory M. Wallraff "Acid-catalyzed single-layer resists for ArF lithography", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available