Dependence of excimer laser beam properties on laser gas composition

Robert E. Turner; John L. Remo; Vinod Kumar

doi:10.1117/12.143040

19 April 1993 Dependence of excimer laser beam properties on laser gas composition

Robert E. Turner, John L. Remo, Vinod Kumar

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143040
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Several new applications of excimer lasers in industry and medicine have increased the requirements for control of excimer laser beam parameters. Some applications require precise control of spatial uniformity, pulse-to-pulse amplitude variations and temporal profiles. The spatial and temporal characteristics of excimer laser beams are affected by small changes in laser gas composition. The role of gas composition, as well as methods for controlling gas composition, are discussed in relation to critical beam parameters.

Citation Download Citation

Robert E. Turner, John L. Remo, and Vinod Kumar "Dependence of excimer laser beam properties on laser gas composition", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143040

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