Supersmooth surface profile on-line testing

Dawei Tu; Yongmo Zhuo; Zukang Lu

doi:10.1117/12.145567

28 May 1993 Supersmooth surface profile on-line testing

Dawei Tu, Yongmo Zhuo, Zukang Lu

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145567
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

An optical non-contact profilometer is presented for in-process measurement of super-smooth surfaces, applying a common-path interferometer and signal correlation processing technique. Environmental disturbation and laser amplitude noise, which commonly exist in similar instruments are overcome in the system. The overall simplicity of the optics and electronics, the low cost of components and the ease of alignment make this a convenient system to implement.

Citation Download Citation

Dawei Tu, Yongmo Zhuo, and Zukang Lu "Supersmooth surface profile on-line testing", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145567

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