Paper
27 October 1992 Novel coating technique for flat-panel application
Hank Bok, Hua-Sou Tong
Author Affiliations +
Proceedings Volume 1815, Display Technologies; (1992) https://doi.org/10.1117/12.131302
Event: International Symposium on Optoelectronics in Computers, Communications, and Control, 1992, Hsinchu, Taiwan
Abstract
A new approach to the application of precision coating to flat panel is presented. This coating method is based on the meniscus coating principal, which provides a very uniform and repeatable coating film to the inverted side of the flat panel of virtually any size. Film thickness of typical 400 angstroms to seven microns can be applied with a film variation of +/- 2%. The main advantages using this coating technique are : (1) no coating liquid edge build-up, (2) insensitive to dust contamination, (3) insensitive to machining accuracy and substrate surface topography, and (4) extremely high transfer efficiency.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hank Bok and Hua-Sou Tong "Novel coating technique for flat-panel application", Proc. SPIE 1815, Display Technologies, (27 October 1992); https://doi.org/10.1117/12.131302
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Coating

Display technology

Liquids

Contamination

Flat panel displays

Photoresist materials

Reflectivity

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