Paper
1 July 1992 Excitation of spectra of diatomic molecule during ion sputtering of metals
Sergey A. Yevdokimov, V. V. Braslavets
Author Affiliations +
Proceedings Volume 1811, Tenth All-Union Symposium and School on High-Resolution Molecular Spectroscopy; (1992) https://doi.org/10.1117/12.131156
Event: Tenth All-Union Symposium and School on High Resolution Molecular Spectroscopy, 1991, Omsk, Russian Federation
Abstract
Till now the limited feasibilities of the traditional sources of molecular spectra did not allow one to obtain sufficiently complete information about irradiational spectra of a great number of practically significant molecules, in particular, diatomic oxides, fluorides and chlorides of metals. The search and investigation of the characteristics of new sources of molecular spectra, which allow carrying out the selective excitation of some definite molecules with minimum amount of spectral lines, seem to be perspective. The surface of a solid body being bombarded by keV ions in vacuum can be regarded as one of such sources. As a result of the bombarding the sputtered particles of the material of the target escape the surface, and the part of the excited particles emits the electromagnetic radiation while escaping the surface.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergey A. Yevdokimov and V. V. Braslavets "Excitation of spectra of diatomic molecule during ion sputtering of metals", Proc. SPIE 1811, Tenth All-Union Symposium and School on High-Resolution Molecular Spectroscopy, (1 July 1992); https://doi.org/10.1117/12.131156
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KEYWORDS
Metals

Molecules

Ions

Sputter deposition

Molecular spectroscopy

Oxygen

Chemical species

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