Status and trends of laser mask-repair technologies

James K. Tison; John M. O'Connor

doi:10.1117/12.142138

26 March 1993 Status and trends of laser mask-repair technologies

James K. Tison, John M. O'Connor

Proceedings Volume 1809, 12th Annual BACUS Symposium on Photomask Technology and Management; (1993) https://doi.org/10.1117/12.142138
Event: Photomask Technology, 1992, Sunnyville, CA, United States

Abstract

In the past several months attention has been focused on improving the chrome repair technology, an equally important consideration for future photomask applications. In this paper a new Nd:YAG laser configuration is described. Chrome machining characteristics of the Nd:YAG laser are discussed in terms of the cut-to-cut dimensional stability and the substrate surface quality after repair. Semi-automated stage motion and positioning techniques have been developed to take full advantage of the improved reproducibility of the Nd:YAG laser. It is shown that repair quality has been significantly improved over the full range of repair dimensions compared with the Nd:YAG laser configuration currently employed in laser mask repair tools. In conclusion, the implications of these improvements for future mask applications, including phase-shifting masks, are discussed.

Citation Download Citation

James K. Tison and John M. O'Connor "Status and trends of laser mask-repair technologies", Proc. SPIE 1809, 12th Annual BACUS Symposium on Photomask Technology and Management, (26 March 1993); https://doi.org/10.1117/12.142138

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