Titanium nitride: titanium silicide structures obtained by multipulse excimer laser irradiation

Emilia D'Anna; M. L. De Giorgi; Armando Luches; Maurizio Martino; Valentin Craciun; Ion N. Mihailescu; Paolo Mengucci

doi:10.1117/12.58628

1 April 1992 Titanium nitride: titanium silicide structures obtained by multipulse excimer laser irradiation

Emilia D'Anna, M. L. De Giorgi, Armando Luches, Maurizio Martino, Valentin Craciun, Ion N. Mihailescu, Paolo Mengucci

Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58628
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

We synthesized stable and adherent TiSi₂ layers by one-step excimer-laser irradiation of Ti films deposited on Si wafers. By multipulse laser irradiation a regime was got when Ti covering Si windows, opened into SiO₂ layer grown on the Si substrate, was completely reacted, while the neighbour Ti covering the SiO₂ interlayer was entirely expelled. This means that a self-aligned silicide layer (salicide) was formed. Moreover, it is shown that by mulitpulse irradiation of Ti/Si samples in nitrogen atmosphere, it is possible to obtain multilevel TiN/TiSi₂/Si structures with titanium silicide formed at the Ti-Si interface and titanium nitride formed at the Ti surface.

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Emilia D'Anna, M. L. De Giorgi, Armando Luches, Maurizio Martino, Valentin Craciun, Ion N. Mihailescu, and Paolo Mengucci "Titanium nitride: titanium silicide structures obtained by multipulse excimer laser irradiation", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); https://doi.org/10.1117/12.58628

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