Fabrication and testing of grazing incidence mirrors for hard x rays

Fumihiko Uchida; Yoshio Suzuki

doi:10.1117/12.132134

20 October 1992 Fabrication and testing of grazing incidence mirrors for hard x rays

Fumihiko Uchida, Yoshio Suzuki

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132134
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Diamond-cut flat mirrors with controlled surface roughness are evaluated by measuring the angular distributions of x-ray scattering in the hard x-ray region (1 Angstrom). The reflection profile, for a glancing angle of 1 mrad, has a sharp peak with a FWHM of less than 10 (mu) rad. This has a potential application to a hard x-ray microprobe with a sub-micrometers spot. The reflection profile includes subpeaks due to surface undulations of about a 6 mm period equal to the ball screw lead of the cutting machine. However, small pitches in the surface roughness, such as the tool feed (15 micrometers ), do not affect the peak profile of the reflection beam, because the diffraction angle is detected at more than 1 mrad away from the specular reflection angle.

Citation Download Citation

Fumihiko Uchida and Yoshio Suzuki "Fabrication and testing of grazing incidence mirrors for hard x rays", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132134

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