Performance of a high-frame-rate CCD imager

Peter A. Levine; Donald J. Sauer; Fu-Lung Hseuh; Frank V. Shallcross; Grazyna M. Meray; Gordon Charles Taylor; Gary W. Hughes; John M. Pellegrino; Deborah R. Simon; Lorna J. Harrison; William B. Lawler

doi:10.1117/12.138074

28 August 1992 Performance of a high-frame-rate CCD imager

Peter A. Levine, Donald J. Sauer, Fu-Lung Hseuh, Frank V. Shallcross, Grazyna M. Meray, Gordon Charles Taylor, Gary W. Hughes, John M. Pellegrino, Deborah R. Simon, Lorna J. Harrison, William B. Lawler

Author Affiliations +

Proceedings Volume 1693, Surveillance Technologies II; (1992) https://doi.org/10.1117/12.138074
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Back-illuminated, 16-port 512 X 512 and 32-port 1024 X 1024 charge coupled device (CCD) imagers have been fabricated. The measured performance of the 512 X 512 pixel chip is described, including data on quantum efficiency, dynamic range, dark current, frame rates, uniformity, contrast transfer function, and on-chip correlated double- sampling (CDS) amplifier noise. We have previously reported on these designs. The CCD arrays are designed with a unique combination of parameters optimized for applications requiring high resolution combined with high frame rates and wide dynamic range. The imaging registers achieve 100% optical fill factor and high quantum efficiency through the use of substrate thinning and back-side illumination. The high frame-rate readout is obtained by the use of a dual storage register and multiple floating-diffusion output ports which reduce the 512 X 512 array readout frequency to 15 MHz for 800 frame per second operation. On- chip CDS amplifiers are included in each output port to reduce the readout noise and simplify off-chip analog signal processing. Both designs include a buried anti-blooming drain structure and electro static discharge (ESD) protection.

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Peter A. Levine, Donald J. Sauer, Fu-Lung Hseuh, Frank V. Shallcross, Grazyna M. Meray, Gordon Charles Taylor, Gary W. Hughes, John M. Pellegrino, Deborah R. Simon, Lorna J. Harrison, and William B. Lawler "Performance of a high-frame-rate CCD imager", Proc. SPIE 1693, Surveillance Technologies II, (28 August 1992); https://doi.org/10.1117/12.138074

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